Abstract

Optical non-contact measurement has many advantages, which has been widely used in the precise size measurement. Since the precision axle hole's inner diameter is small, the measuring axis optical system cannot be placed into the axle hole. As a result, the optical non-contact measurement is difficult to be applied in the occasion above. In this paper, a set of optical system based on off-axis imaging principle that applied to small axle hole's inner diameter measurement is designed. According to the Scheimpflug principle, the relationship of object plane tilt and image plane tilt is derived in this paper. To meet the requirement of measurement accuracy, an off-axis imaging system with a suitable magnification is presented. The off-axis imaging optical system cooperating with the fiber collimator and the PSD can attain 2μm measurement accuracy.

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