Abstract
This paper presents a high-sensitivity passive wireless humidity sensor system with a portable telemetry unit for applications in sealed environments. A complementary metal oxide semiconductor (CMOS) interdigital capacitive humidity sensor die was attached to an organic substrate (FR-4) on which a fixed planar spiral copper inductor was fabricated. The variable capacitor and the fixed inductor were wire bonded to form an inductor-capacitor (LC) tank circuit. The resonant frequency of the sensor tank is dependent on the sensor capacitance, which changes in response to the humidity. The sensitivity of the capacitive sensor was improved significantly using graphene oxide as a sensing material. The package-level integration was achieved by employing the embedded inductor on an organic packaging substrate. The LC-type sensor is interrogated wirelessly using our homemade portable telemetry unit, which is based on a standing wave ratio bridge to measure the real part of the readout coil impedance. Measurements show a sensitivity of -18.75 kHz/%RH over a range of 15%-95% RH. The implemented telemetry unit addresses the need for a low-cost, portable, and universal reader of the LC-type passive wireless sensors.
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