Abstract
An X-band (8-12 GHz) dual channel microwave phase detector is investigated. This phase detector is based on measuring the output power by microelectromechanical systems sensors. The device is fabricated by GaAs monolithic microwave integrated circuit technology. Experiments show that this dual channel detector can detect a phase difference in entire cycle from -180° to +180°. Its frequency response reaches maximum at 9.6 GHz. By cascading a capacitive power sensor, the dynamic range of this system has been expanded up to 2 W and the phase sensitivity can reach to 58.91 μV/deg.
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