An <inline-formula> <tex-math notation="LaTeX">$80\times25$ </tex-math> </inline-formula> Pixel CMOS Single-Photon Sensor With Flexible On-Chip Time Gating of 40 Subarrays for Solid-State 3-D Range Imaging

Abstract

A CMOS solid-state 3-D range imager that uses short (~110 ps) laser pulses and a novel flexible time gating scheme for a single-photon avalanche diode (SPAD) array is presented. The array is divided into 40 subarrays for which a narrow ( $80\times25 $ pixels overall with $10 \times 5$ pixel subarrays. The fill factor of the sensor area is 32%. A 3-D range image is demonstrated at ~10 frames/s with centimeter-level precision in the case of passive targets within a range of ~4 m and a field of view of $18^{\circ }\times 28^{\circ}$ , requiring an average active illumination power of only 0.1 mW.