An LED multichannel spectral ellipsometer with binary modulation of the polarization state

Abstract

The use of a set of eight light-emitting diodes (LEDs) in a multichannel spectral ellipsometer with binary modulation of the polarization state allowed the development of a simple ellipsometer with a fully spanned wavelength range of 350–810 nm and high performance characteristics. The obtained reproducibility and stability of measurements of the ellipsometric parameters Ψ and Δ are 0.01° and 0.03°, respectively. The minimum times of measuring Ψ and Δ in the wavelength range of 435–690 nm and in the total range of 350–810 nm are 0.5 and 5 s, respectively.