Abstract
An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10 −10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×10 10 cps Pa −1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.
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