Abstract
In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.
Highlights
In precision measurement, many basic applications with optical sensing technologies are applied, such as the laser interferometer principle, piezoelectric actuator principle, and micro-encoding principle [1,2,3,4]
A unique surface topography named polar microstructure has been developed for the abovementioned measurement method [12,13]
For For the concentric circle groove processing in single-point diamond turning (SPDT)(Circle), the face, so the initial surface topography model (STM) of the workpiece needs to be firstly the workpiece keeps spinning, anddiamond the diamond tool remains stationary after every posiworkpiece keeps spinning, and the tool remains stationary after every certaincertain position of established
Summary
Many basic applications with optical sensing technologies are applied, such as the laser interferometer principle, piezoelectric actuator principle, and micro-encoding principle [1,2,3,4]. Errors of air wavelengths and refractive index are the essential uncertainty sources [6] and would lead to Abbe and accumulation errors for multiple degree-of-freedom (DOF) tasks, due to such principles only enabling the measurement of a single DOF [7] To avoid these limitations, vision-based techniques are used for precision measurement [8,9,10,11]. Polar microstructures aim to serve as a unique global map used for the subsequent matching measurement. MiTaking into account the specific characteristics on the surface of the polar microstructure, crostructure, both the geometric pattern and the arrangement of pixel intensity values are both the geometric and thegray-scale arrangement of pixeldistribution intensity values unique. The modeling of polar microstructures is described, and the algoalgorithm for detecting the feature points is explained. Ters were obtained according to the simulation and experimental results
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