Abstract
We present the first investigation of low energy (1.75 MeV) proton irradiation in SiGe HBT's and discuss proton energy effects in SiGe HBT technology. The results show that after 1.75 MeV 1 /spl times/ 10/sup 14/ p/cm/sup 2/, a semi-insulating substrate is obtained and the peak quality factor of the monolithic inductors is improved by about 18% at 1.6 GHz. Although large current gain degradation for the SiGe HBT's was observed in the RF bias region after 1 /spl times/ 10/sup 14/ p/cm/sup 2/, the degradation in peak f/sub T/ is only about 11%. Proton energy studies from 1.75 MeV to 200 MeV in SiGe HBT's suggest that the conventional damage factor can be used to estimate energy-dependent proton-induced radiation damage in this technology.
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