Abstract
A method for measuring parallelism of transparent optical components with small aperture size is described. It uses a Haidinger-type laser interferometer adapted for the measurement of optical components with millimeter and sub-millimeter aperture size. The method is based on the measurement of the optical thickness variation when the plate under test is translated across a focused laser beam. Measurement results for optical parts with 0.8 mm–10 mm aperture size are presented.
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