An Integrated System for Elemental X-Ray Analysis of Materials

Abstract

The use of energy dispersive analysis of x-rays (EDAX method) is now well entrenched in the electron column field(l), where more scanning electron microscopes have been fitted with EDAX instrumentation than all of the conventional (wavelength-dispersive spectrometer) microprobes ever made. The principle advantage of the EDAX approach for the SEM user is the efficiency of detection, which permits its use at the low power levels of the SEM. In addition, the simultaneous analysis of the entire spectrum and the lack of focusing restrictions that permits analysis of rough samples are important advantages.