An Integrated Piezoelectric Inertial Actuator Controlled by Cam Mechanisms

Abstract

This paper presents a battery-supplied piezoelectric actuator controlled by cam mechanisms. The actuator moves by matching the phase difference between the clamp and the excitation cams. The piezoelectric bimorphs of the actuator are excited by signals from a contact switch driven by the excitation cam. The crucial parameters of the cam mechanisms, contour curve, stroke, and phase difference of clamp and excitation cams are designed and verified by tests. A series of performance tests (such as frequency, voltage, etc.) are carried out, demonstrating a minimum step displacement of $0.7~\mu \text{m}$ and a minimum repeatability parameter of $0.18~\mu \text{m}$ . The performance of the actuator with the battery supply is basically consistent with the DC power. The proposed actuator can be powered by the battery and operates stably, which provides a new idea for the integration of piezoelectric actuators.