Abstract
The injection and ionization of volatile organic compounds (VOA) by an integrated chip is experimentally analyzed in this paper. The integrated chip consists of a needle-to-cylinder electrode mounting on the Polymethyl Methacrylate (PMMA) substrate. The needle-to-cylinder electrode is designed and fabricated by Lithographie, Galvanoformung and Abformung (LIGA) technology. In this paper, the needle is connected to a negative power supply of −5 kV and used as the cathode; the cylinder electrodes are composed of two arrays of cylinders and serve as the anode. The ionic wind is produced based on corona and glow discharges of needle-to-cylinder electrodes. The experimental setup is designed to observe the properties of the needle-to-cylinder discharge and prove its functions as an ion source and air pump. In summary, the main results are as follows: (1) the ionic wind velocity produced by the chip is about 0.79 m/s at an applied voltage of −3300 V; (2) acetic acid and ammonia water can be injected through the chip, which is proved by pH test paper; and (3) the current measured by a Faraday cup is about 10 pA for acetic acid and ammonia with an applied voltage of −3185 V. The integrated chip is promising for portable analytical instruments, such as ion mobility spectrometry (IMS), field asymmetric ion mobility spectrometry (FAIMS), and mass spectrometry (MS).
Highlights
For an analytical instrument, the ion source is a very important component
The discharge waveform of the needle-to-cylinder electrodes was measured by the oscilloscope
We have developed a needle-to-cylinder electrode chip based on LIGA technology
Summary
The ion source is a very important component It can ionize neutral sample molecules and transform them into positive or negative ions, which can be detected by the following detectors [1,2,3]. The ion source was usually used under the condition of vacuum, for which a large gas device was needed but was not suitable for portable instruments. Ding et al reported a novel ambient ionization technique for mass spectrometry. It is a microfabricated glow discharge plasma (MFGDP), where He or Ar plasma can be generated by a direct current voltage [13]. The work presented describes a micro-integrated system chip with integrated functions of the ion source and air pump, and the ionic wind is used to produce ionization and supply the gas
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