Abstract
An integrated magnetic bearing actuator and sensor was realized using a specially designed ferrite pole piece. Eight of these pole pieces have been used in a magnetic bearing system to suspend a 37 mm diameter shaft in a close tolerance bore (50 μm diametral clearance). The sensors measure radial position with a resolution better than 0.25 μm and negligible temperature drift; while each actuator provides a controllable force in the range of 0 - 10 N. A servo loop accurately controls the radial position of the shaft within the bore to prevent any mechanical contact, virtually eliminating friction and wear. This radial control system exhibits a bandwidth greater than 200 Hz and yields a static stiffness of 24 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">6</sup> N/m (140,000 lbs/in).
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