Abstract
A comprehensive MOCVD safety interlock system has been designed and implemented which provides continuous monitoring of critical reactor and laboratory systems. Operator response to system alarms is limited to a single rule — immediate evacuation of the laboratory. The safety interlock system automatically aborts reactor and laboratory operation to predetermined latched states, provides audible and visual indication of the alarm condition, and identifies the detector and location giving rise to the alarm. Computer control of all operating systems enables additional safety to be programmed through interactive software design that eliminates most operator-based errors and provides for safe and reliable reactor operation. A full description is presented of the safety concepts incorporated into the design and construction of the laboratory and reactor system. Since its installation during the past year, the safety interlock system has operated successfully through several power failures and has demonstrated its effectiveness for ensuring a dependable fail-safe environment.
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