Abstract
An integrated inductor, using 0.1 mm Fe-Si alloy composite films, has been developed with a dimension of 4.8 mm × 4.5 mm × 1.0 mm thickness. The developed inductor is structured by stacking of metal alloy composite films with μR = 19.5, which consist of mixed Fe-Si alloy powders and epoxy resin for high current application. These stacked films have an etched spiral copper trace with 9 and quarter turns for 4 layers on each film. Copper trace is patterned with a dimension of 0.07 mm thickness, 0.45 mm width, and 1 mm pitch using photolithography technology. In order to evaluate the performance of the developed inductor, inductance and DC resistance were simulated and measured. The simulated result of 1.05 μH and 83 mΩ is well coincided with measured results of 1 μH and 88 mΩ. It is also confirmed that the inductor has a high current capacity of 3 A rated and 6 A saturated values. As an application, a synchronous step down DC-DC converter using the developed inductor is fabricated with the output power of 6.6 W (3.3 V/2 A) and the switching frequency of 3 MHz. Finally, the maximum efficiency of 87% is achieved from the experiment of this DC-DC converter.
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