Abstract
An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na +, K + and Cl −) and two gas sensors ( P O 2 and P CO 2 ) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si 3N 4-gate ISFET, and use polymeric membrane except for the pH ISFET. The P O 2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The P CO 2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10 −4 and 5 × 10 −1 mol/l. The sensitivities of the P O 2 and P CO 2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.
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