Abstract
The article discusses the technological principles of improving the manufacturing process of consumable cathodes-targets of vacuum electric arc evaporation plants from complex silicides. Which are based on: the selection of chemical composition based on the analysis of state diagrams of double and triple systems, the production of fast-cooled ingots using high-speed induction melting, subsequent grinding and grinding to a powder of the required fraction, static or dynamic pressing of the cathode blank, its sintering and soldering of the current guide. The results of laboratory studies of the process are presented and prototypes of products are obtained.
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