Abstract

Three-dimensional (3D) system integration is one of the promising candidates for the next-generation high-performance and low-power LSI systems. In 3D system integration, we can implement analog and digital circuits in LSI chips in their optimal process and they are stacked and connected through vertical inter-chip link. Development of wide-band and low-power inter-chip link is the key factor to realize high-performance 3D system integration. One of the most attractive applications of 3D system integration is processor-memory interface since memory capacity and bandwidth is a bottleneck of a processor system. Integrating large size memory on a processor increases die size (SRAM) or process steps (eDRAM), either way, raising cost and leakage. It is desired in low-power consumer electronics that a memory chip and a processor chip are each fabricated in their optimal process and integrated by heterogeneous chip stacking in a package. One of the technical challenges is a wide bandwidth between the processor and the memory. The gap between computing power and communication bandwidth can be filled if chip area is used for a data link rather than chip periphery only. A Micro-bump and a capacitive-coupling link (Fazzi et al., 2008) are area interfaces, but they can be used only for two chips that are placed face-to-face. A Through Silicon Via (TSV) (Koyanagi et al., 2009) has fewer limitations, but it requires additional process steps and production equipment. An inductive-coupling link (Miura et al., 2007) is used as a wireless TSV, but with small impact on cost. It is a circuit solution on a standard CMOS process, and hence is less expensive than TSV. It bears comparison with TSV in performance. The data rate is 11Gb/s/channel (Miura et al., 2009) and power efficiency is 65fJ/b (Niitsu et al., 2008). 1Tb/s aggregated bandwidth is achieved by arranging 1000 channels in 1mm

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