Abstract
The paper presents the results of experimental measurements of the emission properties of water inductively coupled plasma. The plasma temperature is calculated using the Boltzmann method. It is shown that the temperature decreases with increasing pressure. The plasma resistance, its conductivity, and the thickness of the skin layer are estimated. Analysis shows that the emissivity of water plasma can be optimized while maintaining the power consumption.
Highlights
Inductively-coupled plasma (ICP) has a number of distinctive properties, such as purity, high stability, and equilibrium, which makes it attractive for use in applications such as coating, etching, the emission analysis of the chemical composition of substances, purification, and disinfection [1]
Inductive discharge was excited in a quartz tube 1 of diameter D = 20–45 mm by a cooper inductor which had N = 2–5 coils
A vacuum pump was installed on one side of the quartz tube, and a vessel with tap water 2 with a metering valve 3 was placed on the other side
Summary
Inductively-coupled plasma (ICP) has a number of distinctive properties, such as purity, high stability, and equilibrium, which makes it attractive for use in applications such as coating, etching, the emission analysis of the chemical composition of substances, purification, and disinfection [1]. There has been an increased interest in the properties of water vapor as a plasma-forming gas for the listed applications since water vapor is a relatively cheap raw material which dissociates in the discharge to form highly reactive oxygen and OH hydroxyl. The presence of atomic hydrogen in the plasma allows a relatively easy spectrometric analysis of parameters such as the plasma temperature and electron concentration from the hydrogen Balmer series [2]. The possibility of using an inductive discharge in water vapor for atomic emission spectrometry was studied in [3]. To excite an inductive discharge, it is necessary to reduce pressure in the discharge chamber to 10-4 – 10-5 bar, which leads to difficulties in introducing the sample into the discharge zone and additional requirements for tightness
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