Abstract

A crucial component to many synchrotron beamlines is the Kirkpatrick–Baez system typically used to condense the synchrotron source to a small illumination spot. The performance of this compound optic often dictates the performance of the entire experimental system. Here, we present the design of a Kirkpatrick–Baez system including numerous in situ alignment controls and an in situ slope-measuring feedback system. Implementation of the system on an extreme ultraviolet undulator beamline is described along with experimental results demonstrating alignment to near diffraction-limited performance.

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