Abstract
In this paper, an improved three-dimensional two-temperature model for multi-pulse femtosecond laser ablation of aluminum was proposed and proved in our experiment. Aiming to achieve hole-drilling with a high ratio of depth/entrance diameter in vacuum, this model can predict the depth and radius of the drilled holes precisely when employing different laser parameters. Additionally, for multi-pulse laser ablation, we found that the laser fluence and number of pulses are the dominant parameters and the multi-pulse ablation threshold is much lower than the single-pulse one, which will help to obtain high-quality holes.
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