Abstract
Microscopic vision displacement calculation is crucial for its high precision and non-contact nature in measuring piezoelectric ceramic displacement. However, the inefficient global search limits its effectiveness. This paper proposes an improved sub-pixel algorithm (GKF-PFBM) based on particle filtering. Firstly, particle filtering (PF) is combined with block matching (BM) to enhance matching efficiency and accuracy by replacing global search with particle state prediction and update. Then, subpixel interpolation using a Gaussian kernel function (GKF) is better adapted to nonlinear variations, handling high-frequency variations while preserving clear edges, thereby improving interpolation accuracy. Finally, a high-precision experimental platform is used to measure the driving characteristics of piezoelectric ceramics. Experimental results show that the mean errors of the GKF-PFBM algorithm and the bilinear interpolation algorithm (BI-BM) are 0.0032pixels and 0.1269pixels, respectively. The average hysteresis displacement error was measured to be approximately 12 nm by this method, verifying its precise non-contact measurement capability.
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