An improved laser ablation method using a shadow mask (eclipse method)

Abstract

To eliminate droplet formation during the laser ablation thin film growth process, we proposed a new laser ablation technique, the “eclipse method,” which facilitated removing this droplet problem completely. In particular, YBa2Cu3Oy films obtained by this method had Tc ˜93 K and droplet-free surfaces. To achieve growth rate enhancement in the low-pressure condition and to introduce the activated species on the substrate in the eclipse method, we further proposed a new composite shadow mask method, the “eclipse angle method.” Furthermore, we found the Ar addition effect to improve the film qualities of Bi-layered crystals. © 1999 Scripta Technica, Electr Eng Jpn, 130(1): 88–94, 2000