An Improved Electro-Kinetic Model for Material Transport on Cr Thin Films

Abstract

Material transport in liquid phase is observed when high magnitude electric field is applied on chromium (Cr) thin films. The high electric field assist in the initiation of a chemical reaction that results in formation of a liquid material. The liquid material appears to flow out in a radially symmetric manner from the negative electrode. The material transport phenomena on Cr thin films are used for a lithography process, known as electrolithography (ELG). Various electrical parameters can be varied in order to control the rate of material transport. However, it is crucial to understand how the electrical properties of the material evolve, which will help us to control the electrical parameters efficiently in order to get steady patterns. In this paper, an improved model is proposed to help understand this material transport phenomenon from an electrical aspect and help attain a greater command over the ELG process. The proposed model is verified using experimental results.