An Immersive 3D Virtual Learning Environment for Analyzing the Atomic Structure of MEMS-Relevant Materials

Abstract

In this paper, an immersive three-dimensional (3D) virtual learning environment based on the Oculus head-mounted display is presented for analyzing the atomic structure of monocrystalline materials relevant to Micro-Electro-Mechanical Systems (MEMS), e.g. Silicon (Si), Chromium (Cr), Titanium (Ti) and Copper (Cu). This environment allows the real-time visualization and interactive analysis of key crystal lattice parameters, e.g. number of atoms in the lattice, atomic packing factor, linear atomic density, surface atomic density, volumetric density, etc.