Abstract
AbstractBased on the information transmission theory, topographic image signals in scanning electron microscopy are used to evaluate contrast, gradient, acutance, and Laplacian operator, the total of which represent the image sharpness of an edge line.One may consider the impulse and step functions as an input to the Gaussian system function of a low‐pass filter, the impulse and step response functions possibly representing a single spot and image contrast of an edge profile, respectively. It is shown that the response function of acutance defined as the power of the gradient normalized by density is a more realistic representation of image edge sharpness. Also, edge sharpness can be greatly enhanced by utilizing the Laplacian operator through digital image processing for a disk specimen model with a rounded edge.Contrast increased by specimen tilt, and an edge effect due to side‐scattered electrons, as well as the signal attenuation by specimen collection, are consistently obtained as the response function in the system.The exact measurement of spot size and edge‐to‐edge resolution, and image sharpness improvement, are derived by digital image processing.
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