Abstract
For complex and large-scale semiconductor manufacturing systems, using real devices for system integration and testing not only increases the cost but also takes a longer time. In this paper, a systematic approach for the emulator design of the manufacturing equipment to achieve system integration is proposed. In the proposed approach, the integration definition language 0 (IDEF0) and Petri net (PN) are applied to perform the functional and behavior analyses of the equipment, and then a verified PN model can be obtained for the implementation of emulators. An application of a rapid thermal process (RTP) in semiconductor manufacturing systems is provided to illustrate the design procedure of the developed approach.
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