Abstract
An extreme ultraviolet (EUV) radiation source based on a low-pressure discharge sustained in a magnetic trap by high-power electromagnetic radiation at a frequency of 75 GHz is discussed. The experimental radiation power in the wavelength range of 13.5 nm ±1% was as high as 50 W. The conversion of microwave radiation into EUV radiation was about 1%.
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More From: Bulletin of the Russian Academy of Sciences: Physics
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