An extra-bright X-ray source

Abstract

A bremsstrahlung X-ray source based on deceleration of electrons in the target is described. Its overall dimensions and cost are typical of bremsstrahlung sources, and the main parameters of its X-ray beam are similar to those of synchrotron sources. In a range of Δλ/λ = 10−3, the spectral radiant power of CuKα is at least 100 mW/mrad with a divergence angle of 1 mrad. The direction of the X-ray beam at the outlet is arbitrary, depending on the source head holder design. The source can be embedded into existing nanolithography systems and used in medical and industrial introscopes and tomographs, in scientific instruments, etc.