Abstract
An electron probe X-ray microanalysis (EPMA) technique, using an energy-dispersive X-ray detector with an ultrathin window, designated a low-Z particle EPMA, has been developed. The low-Z particle EPMA allows the quantitative determination of concentrations of low-Z elements, such as C, N, and O, as well as chemical elements that can be analyzed by conventional energy-dispersive EPMA, in individual particles. Since a data set is usually composed of data for several thousands of particles in order to make environmentally meaningful observations of real atmospheric aerosol samples, the development of a method that fully extracts chemical information contained in the low-Z particle EPMA data is important. An expert system that can rapidly and reliably perform chemical speciation from the low-Z particle EPMA data is presented. This expert system tries to mimic the logic used by experts and is implemented by applying macroprogramming available in MS Excel software. Its feasibility is confirmed by applying the expert system to data for various types of standard particles and a real atmospheric aerosol sample. By applying the expert system, the time necessary for chemical speciation becomes shortened very much and detailed information on particle data can be saved and extracted later if more information is needed for further analysis.
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