Abstract

ABSTRACTThe specific contact resistance between any two interconnecting layers is of vital importance in determining the total interconnection resistance of these layers. We present here an experimental technique to obtain the specific contact resistance when both of the conducting layers have finite conductivities of similar magnitudes. This structure is then used to obtain practical information on the poly to single crystal interconnection system, details of which are present. Finally a modification to this system is proposed and its status reviewed.

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