Abstract

In this work, we report an experimental study on elastic electron collisions with CHF3 in the low and intermediate energy range. More specifically, absolute differential, integral and momentum transfer cross sections are measured and reported in the 20–500 eV range. The measurements were performed using a crossed electron beam–molecular beam geometry. The angular distributions of the scattered electrons were converted to absolute cross sections using the relative flow technique. Integral and momentum transfer cross sections are derived from the measured differential cross sections. A comparison between our measured data with the theoretical and other experimental results available in the literature is made.

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