Abstract

Results of an experimental study of the oxygen permeability of a PET film with nanosized aluminum oxide layers formed by reactive magnetron sputtering have been described. An experimental dependence of the oxygen permeability coefficient of PET film with the aluminum oxide layer in the range of 20 ÷ 80 nm, providing its value up to 1 cm3/(m2∙24h∙0.1MPa), have been determined. The effect of various factors on the formation of a high-quality reproducible oxide PET film and the characteristics of a nanosized aluminum oxide layer and the specific electric energy consumption for the magnetron deposition of the layer has been defined. The planar surface structures and surface roughness parameters of PET and oxide films with layers of different thicknesses have been determined. A qualitative interpretation of the results has been given.

Highlights

  • A well-known and relevant method to decrease the gas and vapor permeability of polymer films is their coating with a dielectric layer of a metal oxide (AlOx, SiOx, TiOx, etc.) of a nanoscale thickness (20–200 nm), which is deposited using various techniques (Zhang, Sang, Wang et al, 2018, Hirvikorpi, 2011, Lingle, 2014, Chang, Hou, Tsai & Jhu, 2014)

  • The best barrier properties with respect to water vapors and oxygen are achieved in the case of deposition of an aluminum oxide layer on polymer films, in particular, a PET film

  • To provide the formation of high-quality oxide polymer films, the surface of the film substrate should be treated before depositing an oxide layer (Berlin & Seidman, 2014, Carcia et al, 2009, Struller et al, 2014)

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Summary

Introduction

A well-known and relevant method to decrease the gas and vapor permeability of polymer films is their coating with a dielectric layer of a metal oxide (AlOx, SiOx, TiOx, etc.) of a nanoscale thickness (20–200 nm), which is deposited using various techniques (Zhang, Sang, Wang et al, 2018, Hirvikorpi, 2011, Lingle, 2014, Chang, Hou, Tsai & Jhu, 2014). This nanosized coating changes the mechanism of permeation of molecules through the bilayer composition and provides a decrease in the gas and vapor permeability to a required level. Vol 14, No 1; 2022 magnetron sputtering on the thickness of the oxide layer, the specific electric energy for the formation of the layer, the surface structure, and the roughness parameters and give a qualitative interpretations of the results obtained

Conditions for Preparing a PET Film With a Nanosized Aluminum Oxide Layer
Conclusion
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