Abstract
The results of optimization of a broadband ultraviolet (UV) radiation source, which is excited with a transverse radio-frequency low-pressure discharge with a planar aperture, are presented. The UV source operates on Kr-Cl2 and Kr-Xe-Cl2 working mixtures. The UV source operates on the system of electron vibrational bands of XeCl* and KrCl* exciplex molecules and chlorine molecules in the spectral range 210–310 nm. The average radiation power reaches 30–50 W at an efficiency of 10–15%.
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