Abstract
Hydrogenated diamond-like carbon (DLC) films were prepared by the radio frequency plasma-enhanced chemical vapor deposition method on silicon substrates using methane (CH 4) and hydrogen (H 2) gas. The wear track on DLC films was examined after the ball-on disk (BOD) measurement with a Raman mapping method. The BOD measurement of DLC films was performed for 1 to 3 h with a 1-hour step time. The sliding traces on the hydrogenated DLC film after the BOD measurement were also observed using an optical microscope. The films synthesized in this work had a very low friction coefficient (about 0.06) and were adhered very well without peeling off during the BOD measurement even with very thin thickness. Energy dispersive X-ray spectra show the decrease of C atomic % and the increase of O atomic % according to the sliding time. The novel Raman mapping method effectively showed the graphitization of DLC films according to the sliding time.
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