Abstract
AbstractTarget factor analysis and principal component analysis have been applied to Auger spectra acquired from two metallic multilayer systems (Cu/Co and Co/Pt) depth profiled using ion beam bevelling. Both multilayers contained alternating 10 nm films, the Co/Pt being capped with 25 nm of Co. The results reveal the expected improvement in the precision of the depth profiles because of the amount of information included in the factor analysis. However, the data sets always contain more factors than expected from the number of different elements present. These extra factors are revealed by examination of the principal components as being due to the depth dependence of the inelastic scattering at energies lower than the Auger features. This yields more information about the samples than can be obtained from inspection of the raw spectra but compromises the accuracy of quantification of the depth profiles.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
