An equivalent electrical circuit model for spiral and cross inductors on 0.35 µm CMOS technology

Abstract

This paper presents a simple equivalent electrical circuit model to represent spiral and cross inductors on CMOS Technology. The inductors were designed and simulated using Momentum/ADS from Keysight, and were fabricated on AMS 0.35 µm CMOS technology. Simulation data was used to develop a RLC model for the inductors, where the reactive elements are constant and the resistance depends on frequency. A linear equation was proposed to represent the frequency dependence of the inductor's resistance. The simulated results of spiral and cross inductors were in good agreement with the model results. On chip measurements of the inductors were performed from 1 to 10 GHz using a network analyzer. The inductance and maximum quality factor obtained from the measured data were well predicted by the proposed model, which showed good precision on spite of its simplicity.