Abstract
An equivalent circuit model for the semi-parallel plate electrostatic torsion mirror has been developed based on the electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent current source as a function of input voltages that interpret the drive voltages and the mirror angle. A use of the suspension width as a fitting parameter explained well the experimental results of frequency response and the mirror's static deflection.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
