Abstract
In this study, we report an equivalent circuit model of an electrostatic energy harvester for a SPICE circuit simulator. In order to simulate a harvesting system, the output power of the device is calculated in the simulator. The capacitance between the electrodes is obtained by FEM analysis by taking the fringing effect into account and the result is applied to a sub-circuit model for the simulator. Mechanical vibrations are converted into electricity by an equivalent circuit model of a mass-spring structure and an electrostatic energy harvester. The simulated output power and output waveform correspond with the measurement results of our electrostatic energy harvester. We also simulate the operation of a harvesting system connected with a power management IC.
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