Abstract
An energy stabilizing system for electron energy loss spectrometers in a transmission electron microscope (TEM) is described. The key element is a wire sensor based fast electron detector that can sample the 'zero-loss' component of the transmitted electrons at a high refreshing rate. A digital based real-time processor is used to determine the relative shift in the zero-loss component beam and to produce a closed feedback loop to stabilize the energy dispersed electron distribution at the back focal plane of the post-column spectrometer. The system had the distinctive advantage of simultaneously acquiring a drift corrected electron energy loss spectrum over the energy range where the beam is sensed while stabilizing the whole energy loss distribution for more efficient acquisition by a separate (parallel) detector. A TEM version of the alignment figure is described to aid the alignment and operation of the system for an energy stabilized post-column spectrometer in a conventional transmission electron microscope. The effect of aberration on the accuracy of the energy stabilization is discussed. © 2008 Elsevier B.V. All rights reserved.
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