Abstract

An energy harvesting type ultrasonic motor is presented in this work. The novel motor not only can drive and/or position the motion mechanism, but also can harvest and convert the vibration-induced energy of the stator into electric energy to power small electronic devices. In the new motor, the stator is a sandwich structure of two PZT rings and an elastic metal body. The PZT ring bonded on the bottom surface is used to excite the stator metal body to generate a traveling wave with converse piezoelectric effect, and the other PZT ring bonded on top surface is used to harvest and convert the vibration-induced energy of the stator into electric energy with direct piezoelectric effect. Finite element method is adopted to analyze the vibration characteristics and the energetic characteristic. After the fabrication of a prototype, the mechanical output and electric energy output abilities are measured. The maximum no-load speed and maximum output torque of the prototype are 117rpm and 0.65Nm at an exciting voltage with amplitude of 134 Vp-p and frequency of 40kHz, and the maximum harvesting output power of per sector area of the harvesting PZT is 327mW under an optimal equivalent load resistance of 6.9kΩ.

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