An empirical formula for angular dependence of sputtering yields

Abstract

Abstract An analytic empirical formula for the angular dependence of light-ion sputtering and heavy-ion sputtering has been proposed. The present empirical formula has two adjustable parameters which are determined by the least-squares method. One of the two parameters corresponds to Sigmundf, and the other is the angle of incidence at the maximum yield. The present empirical formula is found to be very useful for preliminary descriptions of the angular dependence of sputtering yield. This work was carried out under the collaborating Research Program at the Institute of Plasma Physics, Nagoya University. Lindhard's theory of the nuclear stopping power is developed to take into account the binding force between the lattice atoms of solids. It is shown that the nuclear stopping power is proportional to the velocity (not the energy) of the moving atom at the low velocity limit. Debye temperature dependence of the nuclear stopping power is discussed.