An Ellipsoidal Tool as a Nanoscale Removal Processes for Computer and Digital System

Abstract

A newly designed ellipsoidal electrode tool used for micro-electrochemical etching (μ-ECE) in a precise reclamation process that removes defective In2O3SnO2 conductive microstructure from the surface of LCD color filters is presented. The electrochemical removal of ITO film eliminates the danger of scoring the surface of the substrate. The efficiency of the electrochemical process, enhanced by the ellipsoidal shaped electrode, also allows the feed rate of the workpiece (display color filter) to be higher and this reduces production costs. In the current study, a higher current rating and a faster workpiece feed effectively resulted in more effective removal. An ellipsoidal anode with a small major axis coupled with a narrow gap between the cathode and the workpiece also reduces the time taken to remove the In2O3SnO2. An ellipsoidal anode with small minor axis also provides better discharge mobility and removal. A thin cathode or one with a small arc radius also gives a higher removal rate for In2O3SnO2. The effective ellipsoidal anode provides more discharge mobility and removes the In2O3SnO2 easily and cleanly in a short time. The surface roughness, the average light transmittance and chromaticity of the three primary colors is also maintained at the same level after the μ-ECE process as it was before the removal of the ITO.