Abstract
This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.
Highlights
Microelectromechanical (MEMS) mirrors can actively steer light beams. They play an important role in various optical systems and have been widely used in displays [1,2,3], optical switching [4,5,6], Fourier transform spectroscopy [7,8], optical endomicroscopy [9,10,11,12,13,14], tunable lasers [15,16], structured illumination [17], and light detection and ranging (LiDAR) [18,19]
Electrostatic, piezoelectric, electromagnetic, and electrothermal actuations have been commonly used in MEMS mirrors [2]
In thisSelection paper, we present a new electrothermal Cu/W bimorph MEMS mirror with an
Summary
Microelectromechanical (MEMS) mirrors can actively steer light beams. They play an important role in various optical systems and have been widely used in displays [1,2,3], optical switching [4,5,6], Fourier transform spectroscopy [7,8], optical endomicroscopy [9,10,11,12,13,14], tunable lasers [15,16], structured illumination [17], and light detection and ranging (LiDAR) [18,19]. By properly choosing the length ratios of these five segments, the LSF bimorph design long and wide multimorphs that deteriorates the fill factor and resonant frequency. This minimizes the lateral shift of the central mirror plate. This LSF design achieves large vertical actuator design can increase both stiffness and fillCu/W/Cu factor. Alloys with proper compositions are often difficult to find especially for MEMS processes-compatible ones, so only the pure metals commonly used in MEMS or actuator design was firstly developed by Todd et al to overcome the lateral shift and the tip-tilt angle of a single bimorph [25].
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