Abstract
A broadband capacitive electrostatic acoustic transducer (ESAT) has been developed for use in a liquid environment at megahertz frequencies. The ESAT basically consists of a thin conductive membrane stretched over a metallic housing which is sealed for immersion in a liquid environment. The membrane functions as the ground plate of a parallel‐plate capacitor, the other plate being a dc biased electrode recessed approximately 10 μm from the electrically grounded membrane. An ultrasonic wave incident on the membrane vibrates the membrane‐electrode gap spacing and generates an electrical signal proportional to the wave amplitude. Calibration of the ESAT with incident ultrasonic waves of constant displacement amplitude from 1 to 12 MHz reveals a decrease in signal response with increasing frequency independent of membrane tension. A theoretical analysis shows that the coupling between the membrane and the contacting liquid is responsible for this frequency rolloff and that the absolute measurement of the ultrasonic wave displacement amplitude is possible with the ESAT when the correction for the rolloff is applied.
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