Abstract

An electrostatic Einzel lens has been constructed with superposed round lens and quadrupole components. By proper adjustment of the voltages on the electrodes, independent focal lengths can be obtained in the x- and y-directions. A deflection component can be introduced by applying asymmetric potentials to the electrodes. Such a unit, having small dimensions, can be fitted into a relatively small space, reducing at the same time the working distance which is a critical factor for spherical aberration.

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