Abstract
The system for electrostatic deflection of high-energy (up to 10 keV) ion beams at large (up to 7°) angles contains a dodecapole assembly consisting of 12 electrodes and a two-channel deflection voltage source. Each channel generates two voltages symmetrically changing from −600 to +600 V with respect to the ground, and, in this case, the absolute values of the both voltages differ by ≤1 V. The temperature voltage drift is ≤50 ppm/°C. Output voltage levels are set by a 16-bit digital-to-analog converter. The deflection-voltage source is a 95 × 65 × 40-mm module.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
