Abstract
This paper reports the design, micromachining and characterization of an array of electromagnetic energy harvesters (EHs) with multiple frequency peaks. The authors present the combination of three multi-modal spring-mass structures so as to realize at least nine resonant peaks within a single microelectromechanical systems (MEMS) chip. It is assembled with permanent magnet to show an electromagnetic-based energy harvesting capability. This is the first demonstration of multi-frequency MEMS EH existing with more than three resonant peaks within a limited frequency range of 189 to 662 Hz. It provides a more effective approach to harvest energy from the vibration sources of multiple frequency peaks.
Highlights
For wireless sensing nodes and electronic devices, one of the main concerns is the lifetime of the battery-powered system
The key issue is that the resonant frequency of the energy harvesters (EHs) device mismatches ambient vibration frequencies
The results show the possibility of an overall broadened bandwidth of the EH array
Summary
For wireless sensing nodes and electronic devices, one of the main concerns is the lifetime of the battery-powered system. With the fast development of microelectromechanical systems (MEMS) and low-power wireless sensor networks, vibration-based energy harvesters (EHs) are increasingly important as an alternative to batteries for long lasting time and environmental protection [1,2]. Micromachines 2015, 6 demonstrated with single dominant resonant frequency [3,4,5,6,7,8,9,10]. The key issue is that the resonant frequency of the EH device mismatches ambient vibration frequencies. It is necessary to develop multi-frequency or wideband EHs to collect efficient energy from different vibration peaks [12,13,14]
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