Abstract
This paper presents the principle, design, fabrication, and characterization of Molecular Electronic Transducer (MET) dual-axis tilt sensors. The proposed sensor has a 3D-printed cylindrical channel inserted with four double-band electrodes and partially filled with a liquid electrolyte. The double-band electrodes were fabricated by wire winding with a ~0.1 mm anode-cathode distance under controlled tension. It allows the electrode to become any 3D coil rather than a 2D structure by microfabrication and exhibits good repeatability (). The tilting changes the electrolyte level and electrode-electrolyte contact area, resulting in Faradaic current changes. The x-axis and the y-axis sensitivity reach 0.121 V/° and 0.154 V/°, respectively.
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