Abstract

SiO2 nanorod arrays (NRAs) are fabricated on InGaN-based multiple quantum well (MQW) solar cells using self-assembled Ag nanoparticles as the etching mask and subsequent reactive ion etching. The SiO2 NRAs effectively suppress the undesired surface reflections over the wavelengths from 330 to 570nm, which is attributed to the light-trapping effect and the improved mismatch of refractive index at the air/MQW device interface. Under the air mass 1.5 global illumination, the conversion efficiency of the solar cell is enhanced by ∼21% largely due to increased short-circuit current from 0.71 to 0.76mA/cm2. The enhanced device performances by the optical absorption improvement are supported by the simulation analysis as well.

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